Temperature Calibration Equipment and Services for Semiconductor Backend Test
Laboratory and On-Site Calibration
Calibration wafers and thermal plungers are serviced at our facility in Sigmaringen, Germany. Probers, thermal chucks, and controllers can be calibrated at the customer’s facility.
KLA SensArray wafer calibration
Independent calibration for SensArray RTD and TC temperature wafers used in semiconductor backend test.
- Support from -60 °C to +300 °C
- Laboratory service in Sigmaringen, Germany
SigmaTek CW recalibration
Recalibration for SigmaTek CW calibration wafers, with the certificate and calibration data specified for the service.
- RTD and TC wafer calibration
- Certificates and calibration data
Thermal plunger calibration
Calibration for package-test thermal plungers across the temperatures used in backend production and verification.
- Support from -60 °C to +300 °C
- Laboratory calibration in Germany
On-site prober and chuck calibration
Calibrate the prober, thermal chuck, and controller together without shipping production equipment.
- In-person calibration at your facility
- Options for multiple probers and reduced downtime
SigmaTek CW Multi-Sensor Calibration Wafer
The SigmaTek CW is a multi-sensor temperature calibration wafer for verifying and calibrating thermal chucks in laboratory and semiconductor production environments.
- Multi-sensor temperature mapping – Measure temperature uniformity across 150 mm, 200 mm, and 300 mm wafer formats.
- Automation and reporting – Support semi-automated or fully automated calibration, data export, and reporting.
- Recalibration service – Sigma Sensors recalibrates the wafer when its current calibration certificate is due for renewal.
Calibration Procedure
Equipment, temperature range, service location, and documentation requirements are reviewed before calibration begins.
01
Equipment and application review
Provide the equipment model, application, required temperature range, and service location.
02
Scope and documentation confirmation
Sigma Sensors confirms compatibility, service scope, documentation, logistics, and current lead time.
03
Calibration and certificate delivery
The equipment is calibrated and returned with the certificate and data specified in the service quotation.
Laboratory and On-Site Service Capabilities
Sigma Sensors calibrates transportable equipment in Sigmaringen and provides on-site service for probers and thermal systems installed at the customer’s facility.
Sigmaringen calibration laboratory
Laboratory calibration for SigmaTek CW wafers, supported KLA SensArray wafers, and thermal plungers in Germany.
Traceable and accredited calibration
Traceable and ISO/IEC 17025 accredited calibration options are available with service-specific documentation.
On-site system calibration
Calibrate a prober with its thermal chuck and controller in place when moving the system is impractical.
QUOTATIONS AND SERVICE INQUIRIES
Request a Calibration Quotation
For calibration service or product information, provide the equipment model, required temperature range, service location, and documentation requirements. Sigma Sensors will confirm availability and current lead time.