Thermal Chuck Calibration, Thermal calibration wafer

Cowboy Classic - temperature calibration wafer

TekSense Cowboy Classic service wafer is the entry model wafer for thermal chuck calibration. Regardless of being an entry-level product, it still surpasses our competitors’ products in all technical specifications. It can be purchased either freestanding or as a complete system.

The base models offer 5 and 7 sensors on the 200mm configuration and 7 and 9 sensors on the 300mm wafers. The standard accuracy is <0.2K, and the base temperature range is 0 °C to 140 °C with optional upgrades to -40 °C and 150 °C, respectively. This wafer is sold as a complete system only.

From $6,000.00

The Cowboy Classic® is the original Cowboy wafer, made for global service mobility, and verification measurements. It is a low-cost entry model and does not offer any upgrade paths.


Temperature calibration wafer, wafer test


The system features:

Temperature Traceability Factory specification
Diameter 200 & 300 mm
Temperature range (0 °C to 140 °C)
Upgraded temperature range (-40 °C 150 °C)
Sensor to sensor <0.1K
System accuracy 0.2K
Number of sensors in 200 mm 5, 7, 9
Number of sensors in 300 mm 7, 9,13
Thickness < 4 mm
Sensor type PT100
Cabling 4-Wire configuration
Data Logger
Number of channels 4
Number of data loggers 200 mm wafer 2, 3
Number of data logger 300 mm wafer 2,3,4
Connectivity USB, Ethernet
Converter resolution 24 bit
Temperature Resolution 0.01 °C
Operating system Windows XP to Windows 10
Display All sensor channels
Math functions Min, Max, Mean, Range, etc
Min, Max, Mean, Range, etc xls, pdf, proprietary data file
Multiple views Graph, spreadsheet, text
Limits Alert function for out of range data
IP Networking Measurement transfer via LAN connection+


a cowboy wafer is a sandwich-type construction, 2-layer Si wafer with embedded temperature sensors. The materials are all cleanroom safe, non-particle shedding, no outgassing, and temperature resistant.

SPEC refers to the manufacturer’s specification: formulas for A, B, and C type sensors (DIN spec) versus Sigma K2.

Accuracy is the degree to which the result of a measurement, calculation, or specification conforms to the correct value or a standard.

Precision is the refinement in measurement, calculation, or specification, especially as represented by the number of digits given.

This product is covered by Sigma Care! Which gives you a standard 25 cycle, the 3-month warranty is included. This does not cover breakage – strictly workmanship and technical performance. Should a sensor go out or a production defect arise, these are covered for 6 months.

Yes, Sigma Care extends the warranty to 12 months and is available on an extended basis.

Recalibration is up to the customer. SIGMA recommends a 12-month interval until drift is established and documented. Your process requirements should override any recommendations as we do not have any input on your processes.