IR - INFRARED
WAFER

IR / Hybrid IR - infrared wafer

TekSense IR – Infrared wafer enables complete surface temperature characterization independent of the number of physical temperature sensors. This wafer comes in 2 basic versions:

  1. With reference temperature sensor to adjust emissivity / transmissivity to match reference temperature setting
  2. Without reference temperature sensor to show uniformity only as the relative temperature error stays constant over the surface of the wafer.
  3. IR camera not included

 

From $6,000.00

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The no reference version enables the characterization of thermal chuck temperature uniformity by exposing the thermal gradients on the chuck. The relative error to the actual temperature is constant over the surface of the chuck but unknown. The uniformity from high to low as well as the overall temperature distribution is indicated correctly though.

N-REF

T-REF

The wafer version with reference temperature sensor enables you to adjust your camera settings in such a way as to read out the correct matching temperatures and thereby offers traceability to ITS90.

In the current version, this wafer is available for:

Wafer temperature measurements also showing the external influences on the wafer in a no probecard environment.

The temperature range is from 0C° to +200C° even though lower temperatures can be characterized depending on camera capability. Specifications are camera-dependent.

IR / Hybrid IR - infrared wafer

TekSense IR – Infrared wafer enables complete surface temperature characterization independent of the number of physical temperature wafers. This wafer comes in 2 basic version: a) with reference temperature sensor b) without reference temperature sensor (IR camera not included).

The no reference version enables the characterization of thermal chuck temperature uniformity by exposing the thermal gradients on the chuck. The relative error to the actual temperature is constant over the surface of the chuck but unknown. The uniformity from high to low as well as the overall temperature distribution is indicated correctly though.

The wafer version with reference temperature sensor enables you to adjust your camera settings in such a way as to read out the correct matching temperatures and thereby offers traceability to ITS90.

In the current version this wafer is available for a) wafer temperature measurements which also show the external influences on the wafer and b) for chuck temperature measurements excluding the external influences.

Temperature range is from 0 to +200C even though lower temperatures can be characterized depending on camera capability. Specifications are camera dependent.

Please contact us for more details

Frequently asked questions

SPEC refers to the manufacturers specification: formulas for A, B and C type sensors (DIN spec) versus Sigma K2.

Temperature sensor performance can only be calibrated at temperature whereas other available temperature wafers strictly measur the electrical accuracy of the meter and use sensor specifications. At the extreme temperature ranges.

The performance window opens up and can be as much as +-0.5C in either direction. SIGMA calibrates at temperature and verifies at temperature. Our top of the loine models undergo a minimum of 6 calibration runs accounting for all parameters.

Unlike other wafers, our wafers come customized for all budgets and requirements, are mdae for global mobility, can be purchased as wafer plus data only for use with your own meter. In addition we do offer a shatter free option.

With the estimator tool you can obtain rough pricing. Once you have settled on a configuration to be quoted, just select “Quote now” and enter your contact information as well as referrer code for an additional 5% discount, After generation of the quote it will be manually reviewed and released with a copy to our agent so that he can contact you to discuss and answer any additional questions you may have.

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