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Sigma Sensors offers ITS90 traceable thermal chuck calibration services using our K2 Calibration wafers (Sigma Sensors / TekSense).
The 200mm chucks can be calibrated with either 9 or 13 sensors.
Alternatively, the 300mm chucks may be calibrated with 13 or 17 sensors.
The wafer will be calibrated using five temperature points.
Select your formate below: