Onsite Thermal Chuck Calibration (Traceable ITS90)

Sigma Sensors offers ITS90 traceable thermal chuck calibration services using our K2 Calibration wafers (Sigma Sensors / TekSense).

The 200mm chucks can be calibrated with either 9 or 13 sensors.

Alternatively, the 300mm chucks may be calibrated with 13 or 17 sensors.

The wafer will be calibrated using five temperature points.

Select your formate below: