Cowboy Wafer, 200 / 300mm, Thermal calibration wafer for temperature chucks
- 5-13 sensors standard (17 optional)
- -40C to +140C standard (-45C to -60C, 175C / 200C optional)
- Sensor to sensor <0.05K
- Uncertainty 0.1K k=2
- System accuracy +-0.15K standard
Logging options
- 5-8 channel handheld meter
- USB data export
- optional sensors for chamber and ambient temperature
- 5-17 channel PC data logging, USB to PC
- software included
- channels for min / max / mean /range
- IoT logging up to 8 channels
- control from laptop, tablet, mobile phone
- Remote access via internal server
Mobile / onsite calibration of waferprobe thermal chucks
- 200mm / 300mm
- -45C to +175C
- 7-13 sensor standard
- Measurement uncertainty +-0.12K k=2
- On-site calibration with / without operator
- Remote data-logging
- Certificate
- ISO17025 accredited calibrated, ITS90 traceable standards
Hybrid IR characterization wafer 200mm/300mm
- -45C to +175C – camera determines accuracy
- for use with air and/or watercooled cameras
- 1-4 integrated, calibrated reference sensors for normalization of temperature data
- comprehensive surface map for detailed temperature gradients, each pixel a datapoint
- resolution <0.1C camera dependent
- accuracy to <0.05K over whole range
- No high temperature flicker
Temperature sensor calibration
- DIN spec sensors Pt100/Pt1000
- 2 wire / 4wire
- lead length per customer specification
- -45C to +425C
Calibration wafer rental for in-house calibration
- rent / lease by week / month / quarter / year
- ISO 17025 accredited calibrated meter / ITS90 traceable calibrated
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