Cowboy Wafer

Cowboy Wafer, 200 / 300mm, Thermal calibration wafer for temperature chucks

  • 5-13 sensors standard (17 optional)
  • -40C to +140C standard (-45C to -60C, 175C / 200C optional)
  • Sensor to sensor <0.05K
  • Uncertainty 0.1K k=2
  • System accuracy +-0.15K standard

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