Mobile / onsite calibration of waferprobe thermal chucks

Mobile / onsite calibration of waferprobe thermal chucks

  • 200mm / 300mm
  • -45C to +175C
  • 7-13 sensor standard
  • Measurement uncertainty +-0.12K k=2
  • On-site calibration with / without operator
  • Remote data-logging
  • Certificate
  • ISO17025 accredited calibrated, ITS90 traceable standards

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