Factory Spec
Typical absolute accuracy: 0.2 K. Sensor-to-sensor accuracy: <0.1 K. Includes a traceable certificate of conformity.
SigmaTek CW temperature calibration wafer
Multi-sensor temperature measurement, thermal chuck calibration, automation, reporting, and data export for semiconductor backend test.
SigmaTek CW multi-sensor temperature calibration wafer
The SigmaTek CW measures temperature distribution across wafer probers and thermal chucks. Available software supports manual, semi-automated, and fully automated calibration, reporting, and live data export.
Product capabilities
- Wafer formats – Standard configurations are available in 150 mm, 200 mm, and 300 mm wafer formats; custom configurations are also available.
- Automation options – Windows 10/11 software supports semi-automated and fully automated calibration and verification.
- Two-layer construction – The two-layer design improves durability and handling.
- Data logging – Logging includes temperature-time graphs, wafer maps, and reporting.
- Repairable construction – Repairable construction supports an extended service life.
- ESD-protective housing – ESD-protective housing is supplied for handling and storage.
Applications
Temperature measurement and calibration applications for semiconductor backend test equipment.
- Thermal chuck calibration and verification – Characterization of temperature accuracy and uniformity across the wafer surface.
- Production and laboratory use – Use in semiconductor production facilities, calibration laboratories, and research facilities.
Automation options
Windows 10/11-based software with automated prober temperature control and controller offset update. Compatible with leading wafer probers and thermal chucks. Semi-automated and fully automated options available with optional output documentation and reporting.
- Windows 10/11-based software – Automated prober temperature control and controller offset update.
- Semi-automation – Automated prober temperature control with manual offset update.
- Full automation – Fully automated offset update and verification.
- Compatibility – Compatible with wafer probers and thermal chucks from Accretech, ATT, ERS, MPI, Cascade, and other manufacturers.
- Reporting – Optional output documentation and reporting.
Data export and networking
Software options include data visualization, statistical functions, file export, and wired or wireless connectivity.
- Data visualization – Temperature-time graphs and temperature maps, including live display on a tablet or mobile device.
- Mathematical functions – Minimum, maximum, mean, median, midrange, and range.
- Data export – CSV, XLSX, PDF, and JSON; additional formats are available on request.
- Networking – Bluetooth, Wi-Fi, and USB.
Standard software
Manual operation with no reporting.
- Time / temperature graph – Real-time and saved temperature data.
- Sensor stats – Minimum, maximum, mean, median, midrange, and range.
- Wafer map – Visualization of temperature distribution across the wafer.
- Save file as CSV – CSV export for further analysis.
Automation software
Manual Mode SAR; Semi-Automatic ACR via GPIB or other intelligent interfaces; Fully-Automatic AOC via Ethernet. Optional automated test reporting.
- Manual Mode SAR (included) – Compatible with any prober or thermal chuck; includes a time-temperature graph, wafer map, and automated test report.
- Semi-Automatic ACR – Automated calibration routines via GPIB or other supported interfaces. Lot Calibration includes a check run, manual offset update, and verification run. In-Situ Calibration applies offsets and verifies acceptance at each step.
- Fully-Automatic AOC – Ethernet-based operation for supported OEM chucks, including ATT v5 and ERS AC3. The software applies ramp and acceptance criteria, checks temperature, adjusts and verifies offsets, saves measurements, and generates before-and-after reports.
- Note – Availability depends on the equipment configuration. An OEM software update may be required.
Configuration and pricing
Contact Sigma Sensors for available wafer sizes, sensor configurations, software options, calibration levels, pricing, and distributor inquiries.
Calibration and accuracy options
Available calibration levels differ by sensor-to-sensor accuracy, absolute accuracy, certificate type, and included data.
Factory Calibration
ISO 9001:2015 calibration with certificate and data. Sensor-to-sensor accuracy: <0.05 K. Absolute accuracy: 0.15 K.
Accredited Calibration
ISO/IEC 17025:2017 accredited calibration. Sensor-to-sensor accuracy: 0.03 K. Absolute accuracy: 0.1 K (0.2 K, k=2). Includes certificate and data.
Specifications summary
Typical specification range for the CW temperature calibration wafer series. Exact specifications depend on purchased configuration. Subject to change.
| Trait | Spec |
|---|---|
| Wafer Size | 150mm, 200mm, 300mm, custom |
| Temperature Range | -40℃ to +150℃ / -60℃ to +200℃ / (-75℃ to +300℃) |
| Sensor Accuracy | <0.05 K sensor-to-sensor, 0.1 K (0.2 K, k=2) |
| Resolution | 0.01 K |
| Number of Sensors | 5 / 9 / 13 / 17 / 25 / 29 custom |
| Thickness | < 4.5mm |
| Hard-Shell Case Dimensions | (200mm) 460 x 375 x 96mm, (300mm) 520 x 410 x 110mm |
| Logger Dim. (mm) | 5: 70x70x20; 10: 80x90x20; 20: 85x150x120; 30: 95x200x20 |
| Operating System | Linux / Windows 10, 11 |
| Networking | Bluetooth, WiFi standard, USB |
| Power | 5V USB-C, 2A |
| Data Export | CSV, XLSX, PDF, JSON (others on request) |
| Math Functions | min, max, mean, median, midrange, range |