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Advanced Thermal Metrology Platforms

Sigma Sensors offers the industry’s most advanced thermal calibration and verification platforms for semiconductor backend test

SigmaTek CW – Multi-Sensor Temperature Calibration Wafer

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The SigmaTek CW Calibration Wafer System is engineered for high-accuracy thermal verification, enabling fully automated or semi-automated calibration of wafer probers and temperature chucks. This product delivers:  High-density 5–29 sensor arrays for full-wafer spatial temperature mapping Sensor-to-sensor precision < 0.05 K (up to < 0.03 K with accredited calibration) Absolute temperature accuracy to ± 0.1 K (0.2 K, k = 2) Universal compatibility across leading wafer probers and thermal chucks Durable, repairable construction with ESD protection Intuitive logging, visualization, and reporting options Connectivity via Bluetooth, Wi-Fi, or USB for live data export and analysis

  • Universal Compatibility – designed for universal application across all 200 and 300 mm thermal chucks
  • Full Automation Options – Windows 10/11-based software with options from semi-automated to fully automated calibration and verification
  • Durable and Shatter-Free – a unique two-layer design increases durability and longevity, and makes handling easier
  • Intuitive Comprehensive Logging – intuitive logging with temperature-time graphs, wafer maps, and reporting
  • Repairable – repairable construction for extended service life
  • ESD-protective housing – ESD-protective housing for safe handling

Applications

  • Thermal Chuck Calibration, Characterization, and Verification –
  • Wafer fabs, laboratories, and other research facilities –

Automation Options

Windows 10/11-based software with automated prober temperature control and controller offset update. Compatible with leading wafer probers and thermal chucks. Semi-automated and fully automated options available with optional output documentation and reporting.

  • Windows 10/11-based software – automated prober temperature control and controller offset update
  • Semi-automation – automated prober temperature control with manual offset update
  • Full automation – fully automated offset update and verification
  • Compatibility – compatible with leading wafer probers and thermal chucks including Accretech, ATT, ERS, MPI, Cascade, and more
  • Reporting – optional output documentation and reporting

Data Export / Networking

Multiple options for data visualization, export, and networking to meet your needs.

  • Data Visualization – temperature-time graphs and temperature maps; also available live on tablet or mobile device
  • Mathematical Functions – min, max, mean, median, midrange and range for advanced data logging
  • Data Export – CSV, XLSX, PDF, JSON (others on request)
  • Networking – Bluetooth and WiFi standard, USB

Standard Software

Manual operation with no reporting.

  • Time / temperature graph – real-time and saved
  • Sensor stats – min, max, mean, median, midrange, range
  • Wafer map – Visualization of temperature distribution across the wafer
  • Save file as CSV – Export data to CSV for further analysis

Automation Software

Manual Mode SAR; Semi-Automatic ACR via GPIB or other intelligent interfaces; Fully-Automatic AOC via Ethernet. Optional automated test reporting.

  • Manual Mode SAR (included) – any prober / thermal chuck; time / temperature graph; wafer map; automated test report
  • Semi-Automatic ACR – automated calibration routines via GPIB or other intelligent interfaces: Lot Calibration with check run, manual offset update, and verification run; In‑Situ calibration with offset application and acceptance at each step
  • Fully-Automatic AOC – newer OEM chucks (ATT v5, ERS AC3) via Ethernet: determine ramp and acceptance criteria, start fully automatic AOC, check temperatures, adjust and verify offsets, save measurements and generate report; shows min / max / median and range, denotes before/after
  • Note – availability depends on exact configuration; OEM software update (patch) may be required

Get Pricing and Options

Please inquire for options and pricing. Agents welcome.

    Accuracy Options

    Sigma Sensors offers different tiers of calibration and accuracy to help customers balance cost with their performance requirements.

    Factory Spec

    Typical accuracy 0.2 K with sensor-to-sensor <0.1K. This is the most cost-effective option for customers who can tolerate a lower accuracy. Certificate of conformity, traceable

    Factory Calibration

    ISO9001:2015 calibration with certificate and data. Sensor-to-sensor accuracy <0.05 K and absolute accuracy 0.15 K. This is the best option for customers who need a higher accuracy but do not require an ISO/IEC 17025:2017 accredited calibration.

    Accredited Calibration

    ISO/IEC 17025:2017 accredited calibration. Sensor to sensor 0.03K Absolute accuracy 0.1 K (0.2 K, k=2). Includes certificate and data.

    Specifications Summary

    Typical specification range for the CW temperature calibration wafer series. Exact specifications depend on purchased configuration. Subject to change.

    TraitSpec
    Wafer Size150mm, 200mm, 300mm, custom
    Temperature Range-40℃ to +150℃ / -60℃ to +200℃ / (-75℃ to +300℃)
    Sensor Accuracy<0.05 K sensor-to-sensor, 0.1 K (0.2 K, k=2)
    Resolution0.01 K
    Number of Sensors5 / 9 / 13 / 17 / 25 / 29 custom
    Thickness< 4.5mm
    Hard-Shell Case Dimensions(200mm) 460 x 375 x 96mm, (300mm) 520 x 410 x 110mm
    Logger Dim. (mm)5: 70x70x20; 10: 80x90x20; 20: 85x150x120; 30: 95x200x20
    Operating SystemLinux / Windows 10, 11
    NetworkingBluetooth, WiFi standard, USB
    Power5V USB-C, 2A
    Data ExportCSV, XLSX, PDF, JSON (others on request)
    Math Functionsmin, max, mean, median, midrange, range