Laboratory and on-site temperature calibration services.
Sigma Sensors calibrates temperature wafers and thermal plungers in Sigmaringen, Germany, and provides on-site calibration for probers, thermal chucks, and controllers.
Services by equipment type.
Service scope is determined by the equipment model, required temperature range, shipping requirements, system configuration, and required documentation.
KLA SensArray wafers
Independent calibration for supported SensArray RTD and TC wafers used in backend test.
- -60 °C to +300 °C
- Calibration in Sigmaringen, Germany
SigmaTek CW wafers
Recalibration for Sigma Sensors multi-sensor temperature wafers when the current certificate is due to expire.
- RTD and TC wafer calibration
- Certificate and calibration data
Thermal plungers
Laboratory calibration for package-test thermal plungers across backend test temperature ranges.
- -60 °C to +300 °C
- Traceable and accredited options
Probers, chucks, and controllers
On-site calibration for complete prober thermal systems or for a thermal chuck and controller pair.
- Measure the system in its operating environment
- Avoid shipping large production equipment
KLA SensArray wafer calibration
Sigma Sensors independently calibrates supported KLA SensArray RTD and TC temperature wafers at our laboratory in Sigmaringen, Germany. Model compatibility and current turnaround are confirmed before shipment.
- Backend test models – Support for SensArray RTD and TC wafer models used with backend probers and thermal chucks.
- Temperature range – Calibration capability from -60 °C to +300 °C.
- Compatibility confirmation – Share the SensArray model and required service so we can confirm compatibility and current turnaround.


SigmaTek CW and thermal plunger laboratory calibration
Our Sigmaringen laboratory calibrates SigmaTek CW wafers and package-test thermal plungers from -60 °C to +300 °C. Available documentation depends on the confirmed calibration service.
- SigmaTek CW recalibration – Renew the calibration of a SigmaTek CW wafer before or after its current certificate expires.
- Thermal plunger calibration – Calibrate package-test plungers across temperatures from -60 °C to +300 °C.
- Certificate and calibration data – Receive the certificate and calibration data appropriate to the agreed traceable or accredited service.
On-site prober, chuck, and controller calibration
A prober is normally calibrated where it operates because moving a complete system is impractical. Sigma Sensors can measure the prober with its thermal chuck and controller as a working pair at your facility.
- Complete-system calibration – Evaluate the prober, thermal chuck, and controller together in the environment where they are used.
- Chuck and controller pairs – A chuck and its controller can also be calibrated together when that is the relevant equipment scope.
- SigmaTek CW calibration wafer option – Customers can purchase a SigmaTek CW calibration wafer and supporting software to calibrate thermal chucks at their own facility.

Information required for a calibration request.
Provide the following information so Sigma Sensors can confirm the service scope, documentation, logistics, and turnaround.
01
Equipment and model
Tell us whether you have a KLA SensArray wafer, SigmaTek CW wafer, thermal plunger, chuck and controller, or complete prober.
02
Range and documentation
Provide the required temperature range and whether you need traceable or accredited calibration.
03
Location and timing
Share where the equipment is located and when it must return to service so we can confirm logistics and turnaround.
CALIBRATION SERVICE REQUEST
Submit equipment and service requirements.
Include the equipment model, required temperature range, documentation requirements, location, and requested completion date.