Laboratory and on-site temperature calibration services.

Sigma Sensors calibrates temperature wafers and thermal plungers in Sigmaringen, Germany, and provides on-site calibration for probers, thermal chucks, and controllers.

CALIBRATION SERVICES

Services by equipment type.

Service scope is determined by the equipment model, required temperature range, shipping requirements, system configuration, and required documentation.

KLA SensArray wafers

Independent calibration for supported SensArray RTD and TC wafers used in backend test.

  • -60 °C to +300 °C
  • Calibration in Sigmaringen, Germany

SigmaTek CW wafers

Recalibration for Sigma Sensors multi-sensor temperature wafers when the current certificate is due to expire.

  • RTD and TC wafer calibration
  • Certificate and calibration data

Thermal plungers

Laboratory calibration for package-test thermal plungers across backend test temperature ranges.

  • -60 °C to +300 °C
  • Traceable and accredited options

Probers, chucks, and controllers

On-site calibration for complete prober thermal systems or for a thermal chuck and controller pair.

  • Measure the system in its operating environment
  • Avoid shipping large production equipment

KLA SensArray wafer calibration

Sigma Sensors independently calibrates supported KLA SensArray RTD and TC temperature wafers at our laboratory in Sigmaringen, Germany. Model compatibility and current turnaround are confirmed before shipment.

  • Backend test modelsSupport for SensArray RTD and TC wafer models used with backend probers and thermal chucks.
  • Temperature rangeCalibration capability from -60 °C to +300 °C.
  • Compatibility confirmationShare the SensArray model and required service so we can confirm compatibility and current turnaround.
Temperature calibration accuracy and tolerance information
SigmaTek CW temperature calibration wafer

SigmaTek CW and thermal plunger laboratory calibration

Our Sigmaringen laboratory calibrates SigmaTek CW wafers and package-test thermal plungers from -60 °C to +300 °C. Available documentation depends on the confirmed calibration service.

  • SigmaTek CW recalibrationRenew the calibration of a SigmaTek CW wafer before or after its current certificate expires.
  • Thermal plunger calibrationCalibrate package-test plungers across temperatures from -60 °C to +300 °C.
  • Certificate and calibration dataReceive the certificate and calibration data appropriate to the agreed traceable or accredited service.

On-site prober, chuck, and controller calibration

A prober is normally calibrated where it operates because moving a complete system is impractical. Sigma Sensors can measure the prober with its thermal chuck and controller as a working pair at your facility.

  • Complete-system calibrationEvaluate the prober, thermal chuck, and controller together in the environment where they are used.
  • Chuck and controller pairsA chuck and its controller can also be calibrated together when that is the relevant equipment scope.
  • SigmaTek CW calibration wafer optionCustomers can purchase a SigmaTek CW calibration wafer and supporting software to calibrate thermal chucks at their own facility.
On-site calibration of semiconductor thermal equipment

Information required for a calibration request.

Provide the following information so Sigma Sensors can confirm the service scope, documentation, logistics, and turnaround.

01

Equipment and model

Tell us whether you have a KLA SensArray wafer, SigmaTek CW wafer, thermal plunger, chuck and controller, or complete prober.

02

Range and documentation

Provide the required temperature range and whether you need traceable or accredited calibration.

03

Location and timing

Share where the equipment is located and when it must return to service so we can confirm logistics and turnaround.

CALIBRATION SERVICE REQUEST

Submit equipment and service requirements.

Include the equipment model, required temperature range, documentation requirements, location, and requested completion date.