Independent KLA SensArray wafer calibration.
Sigma Sensors calibrates supported SensArray RTD and TC temperature wafers used in semiconductor backend test from -60 °C to +300 °C at our laboratory in Sigmaringen, Germany.
Independent KLA SensArray calibration in Germany.
Sigma Sensors calibrates supported KLA SensArray RTD and TC wafers used to verify the thermal performance of semiconductor probers and chucks. Model compatibility, calibration scope, documentation, shipping instructions, and current turnaround are confirmed before the wafer is sent to Sigmaringen.

Calibration for supported KLA SensArray wafers.
Our calibration service is focused on supported KLA SensArray RTD and TC temperature wafer models used with backend probers and thermal chucks.
- -60 °C to +300 °C – Temperature coverage for common backend test calibration and verification requirements.
- RTD and TC wafer models – Contact us with the exact model number so we can confirm service compatibility.
- Calibration in Sigmaringen, Germany – Laboratory service with traceable and ISO/IEC 17025 accredited calibration options.
- Certificate and calibration data – Documentation is matched to the calibration service agreed before the wafer is shipped.
SensArray calibration scope and documentation.
The service scope is based on the wafer model, sensor type, required temperature points, wafer condition, and documentation requirements.
Model compatibility
Sigma Sensors confirms the SensArray model and application before shipment.
- Backend test application
- RTD or TC sensor configuration
Calibration requirements
The required temperature points and traceable or accredited calibration service are confirmed in advance.
- Coverage within -60 °C to +300 °C
- Documentation agreed in advance
Certificate and data
The calibrated wafer is returned with the certificate and data included in the confirmed service.
- Calibration certificate
- Supporting calibration data
SensArray calibration request and shipping process.
Compatibility, service scope, documentation, shipping instructions, and current turnaround are confirmed before shipment.
01
Provide wafer details
Submit the SensArray model, sensor type, required temperature range, and current certificate information.
02
Confirm service and turnaround
Review the calibration scope, documentation, current turnaround, and shipping instructions.
03
Ship to Sigmaringen
Send the wafer for calibration and receive it back with the agreed certificate and data.
KLA SensArray calibration questions
Independent calibration service
Sigma Sensors provides independent calibration services. KLA and SensArray are trademarks of their respective owner; reference to those names describes compatible equipment and does not imply affiliation or endorsement.
SENSARRAY CALIBRATION REQUEST
Request calibration for a KLA SensArray wafer.
Submit the model, sensor type, required temperature range, certificate requirements, and requested completion date.